Spectroscopic temperature measurements in hydrogen inductively-driven plasmas at low pressures

Abstract

Optical emission spectroscopy is applied to obtain the rotational and gas temperatures of an inductively-driven tandem plasma source of negative hydrogen ions. Discharges are maintained in hydrogen at fixed frequency f 27 MHz, applied power P 500 W, and low gas pressure in the range p (26 - 60) mTorr. The rotational and gas temperatures are determined by analyzing the intensity distribution of the H2 Fulcher-α band (d 3Π u a3σg+) line emission. © 2008 IOP Publishing Ltd.