Plasma-Treated Nanostructured Resistive Gas Sensors: A Review

Abstract

Resistive gas sensors are among the most widely used sensors for the detection of various gases. In this type of gas sensor, the gas sensing capability is linked to the surface properties of the sensing layer, and accordingly, modification of the sensing surface is of importance to improve the sensing output. Plasma treatment is a promising way to modify the surface properties of gas sensors, mainly by changing the amounts of oxygen ions, which have a central role in gas sensing reactions. In this review paper, we focus on the role of plasma treatment in the gas sensing features of resistive gas sensors. After an introduction to air pollution, toxic gases, and resistive gas sensors, the main concepts regarding plasma are presented. Then, the impact of plasma treatment on the sensing characteristics of various sensing materials is discussed. As the gas sensing field is an interdisciplinary field, we believe that the present review paper will be of significant interest to researchers with various backgrounds who are working on gas sensors.