Discussion on hydrogen quality detection methods for polysilicon production

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Abstract

This article analyzed the key factors affecting the quality of hydrogen in combination with the improved Siemens polysilicon production process, and the quality detection methods of hydrogen are discussed. Regarding the different hydrogen sources, more scientific and effective quality detection methods are proposed. It is of great significance to strengthen the quality control of polysilicon production and enhance product competitiveness.

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Wan, Y., Yan, D., Xiao, J., Chu, D., & Zhang, Y. (2019). Discussion on hydrogen quality detection methods for polysilicon production. In Journal of Physics: Conference Series (Vol. 1347). Institute of Physics Publishing. https://doi.org/10.1088/1742-6596/1347/1/012106

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