The role of reflectivity change in optically induced recrystallization of thin silicon films

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Abstract

In this paper we study a simplified model of the fundamental mechanisms governing the radiatively induced recrystallization of a thin polysilicon layer on a heat-sink structure. It has been observed that instabilities in laser induced crystal growth on thin polysilicon layers do occur. To study these solidification instabilities we use a linear stability analysis. The reflectivity difference between the liquid and the solid phases is shown to be a source of thermal instability.

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Grigoropoulos, C. P., Buckholz, R. H., & Domoto, G. A. (1986). The role of reflectivity change in optically induced recrystallization of thin silicon films. Journal of Applied Physics, 59(2), 454–458. https://doi.org/10.1063/1.336652

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