Three-dimensional tomography using a soft X-ray holographic microscope and CCD camera

Abstract

The depth resolution of a soft X-ray hologram is much worse than its transverse resolution because a single soft X-ray hologram has a small numerical aperture. To obtain a three-dimensional image, in-line holograms of a specimen were recorded from various directions and reconstructed to obtain two-dimensional projection data. Then, a three-dimensional reconstruction was performed by back-projection of these reconstructed holograms. Three-dimensional images of a tungsten wire of diameter 10 μm and a fossil of a diatom were obtained.