Deep-UV photochemistry and patterning of (aminoethylaminomethyl) phenethylsiloxane self-assembled monolayers

Abstract

The 193 nm photochemistry of (aminoethylaminomethyl)phenethylsiloxane (PEDA) self-assembled manolayers (SAMs) under ambient conditions is described. The primary photodegradation pathways at low exposure doses (<100 mJ cm -2) are benzylic C-N bond cleavage (ca. 68 %), with oxidation of the benzyl C to the aldehyde, and Si-C bond cleavage (ca. 32 %). Amine-containing photoproducts released from the SAM during exposure remain physisorbed on the surface, where they undergo secondary photolysis leading to their complete degradation and removal after ca. 1200 mJ cm-2. NaCl(aq) post-exposure rinsing removes the physisorbed materials, showing that degradation of the original PEDA species (leaving Si-OH) is substantially complete after ca. 450 mJ cm-2. Consequently, patterned, rinsed PEDA SAMs function as efficient templates for fabrication of high-resolution, negative-tone, etectroless metal and DNA features with good selectivity at low dose (i.e., ca. 400 mJ cm-2) via materials grafting to the intact amines remaining in the unirradiated PEDA SAM regions. © 2006 WILEY-VCH Verlag GmbH & Co. KGaA.