Abstract
A process for batch fabrication of low-cost microcoils for magnetic resonance (MR) spectroscopy of clinical biopsy samples is demonstrated. Conductors are fabricated on oxidized, intrinsic silicon substrates by electroplating metals inside a deep photoresist mould. Through-wafer deep reactive ion etching (DRIE) is used to define precise sample volumes and stencil cuts around each die, and dies are separated by snap-out. Single- and multiple-coil (Helmholtz-type) sensors are formed, by stacking parts on silicon baseplates. MR imaging and spectroscopy are both demonstrated on model samples, with high SNR. © 2005 IEEE.
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CITATION STYLE
Syms, R. R. A., Ahmad, M. M., Young, I. R., Gilderdale, D., Collins, D. J., & Leach, M. O. (2005). Batch fabrication of micro-coils for MR spectroscopy on silicon. In Proceedings of IEEE Sensors (Vol. 2005, pp. 227–230). https://doi.org/10.1109/ICSENS.2005.1597677
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