Abstract
This paper presents the study of an original closed-loop conditioning approach for fully-integrated convective inertial sensors. The method is applied to an accelerometer manufactured on a standard CMOS technology using an auto-aligned bulk etching step. Using the thermal behavior of the sensor as a summing function, a first order sigma-delta modulator is built This "electro-physical" modulator realizes an analog-to-digital conversion of the signal. Besides the feedback scheme should improve the sensor performance. ©EDA Publishing/DTIP 2008.
Cite
CITATION STYLE
Leman, O., Mailly, F., Latorre, L., & Nouet, P. (2008). Study of first-order thermal ΣΔ architecture for convective accelerometers. In DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (pp. 100–104). https://doi.org/10.1109/DTIP.2008.4752961
Register to see more suggestions
Mendeley helps you to discover research relevant for your work.
