Spectroscopic study for plasma parameters in co-sputtering system

Abstract

In this work the parameters of plasma (electron temperature Te,electron density ne, electron velocity and ion velocity) have beenstudied by using the spectrometer that collect the spectrum ofplasma. Two cathodes were used (Si:Si) P-type and deposited onglass. In this research argon gas has been used at various values ofpressures (0.5, 0.4, 0.3, and 0.2 torr) with constant deposition time4 hrs. The results of electron temperature were (31596.19, 31099.77,26020.14 and 25372.64) kelvin, and electron density (7.60*1016,8.16*1016, 6.82*1016 and 7.11*1016) m-3. Optical properties of Siwere determined through the optical transmission method usingultraviolet visible spectrophotometer with in the range(300 – 1100) nm.