Nanostructured ceramic-metal coatings obtained by ion-plasma vacuum arc method

Abstract

Ceramic-metal coatings (Ti,Al)N-Cu and (Ti,Al)N-Ni were obtained by Arc-PVD method. Metal components content in the coatings was regulated by varying the ratio between the surface area of the evaporated cathodes and the arcs current evaporating them. Concentration ranges of the metal components content in coatings which ensure the formation of an isomorphous nanocrystalline structure with a grain size of 15-20 nm, have been established. These coatings are characterized by superhardness of 43-51 GPa with preservation of viscosity (relative work of plastic deformation during nanoindentation ∼65-70%). At the same time, the coatings obtained are characterized by a low level of macrostresses.