Preparation of Tantalum Anodic Oxide Film in Citric Acid Solution - Evidence and Effects of Citrate Anion Incorporation

Abstract

Tantalum anodic oxide film was prepared in citric acid solution ofvarious concentrations and the prepared Ta anodic oxide film wascharacterized by various electrochemical techniques and X-rayphotoelectron spectroscopy (XPS). The prepared Ta anodic oxide filmshowed typical n-type semiconducting properties and the dielectricproperties were strongly dependent on the citric acid concentration. Thevariation of electrochemical and electronic properties was explained interms of electrolyte anion incorporation into the anodic oxide film,which was supported by XPS measurements.