Journal ArticleOPEN ACCESS

Study of Nano-Stereolithography Using Evanescent Light (1st report)

  • KAJIHARA Y
  • INAZUKI Y
  • TAKAHASHI S
  • et al.
Journal of the Japan Society for Precision Engineering, Contributed Papers (2006) 72(11) 1391-1396
DOI: 10.2493/jspe.72.1391
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Abstract

We proposed a novel stereolithography method using evanescent light instead of propagating light to realize a 100-nanometer resolution. We carried out theoretical and experimental analyses to verify the method. The analyses show that evanescent light energy is sufficient for curing resin and that it is possible to fabricate micro three-dimensional objects with a 100-nanometer resolution.

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APA

KAJIHARA, Y., INAZUKI, Y., TAKAHASHI, S., & TAKAMASU, K. (2006). Study of Nano-Stereolithography Using Evanescent Light (1st report). Journal of the Japan Society for Precision Engineering, Contributed Papers, 72(11), 1391–1396. https://doi.org/10.2493/jspe.72.1391

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