Study of phase transitions in NbN ultrathin films under composite ion beam irradiation

Abstract

This work demonstrates implementation of Selective Displacement of Atoms (SDA) technique to change the crystal structure and atomic composition of thin superconductive film of NbN under low dose composite ion beam irradiation. All structure investigations were performed using High Resolution Transmission Electron Microscopy (HRTEM) technique by the analysis of Fourier transformation of bright field HRTEM images. It was found that composite ion beam irradiation induces the formation of niobium oxynitrides phases.