Raman Investigations on Diamond Films and Crystals Deposited by Plasma‐Assisted CVD

Abstract

Microwave plasma-assisted chemical vapor deposition has been utilized to deposit thin diamond films on molybdenum substrates. Micro-Raman spectroscopy has been carried out to examine the influence of the crystal size, laser power, and incident wavelength. A computer decomposition of Raman spectra has been attempted that permits appreciation of the evolution of deposit quality with experimental changes, through variations in spectrum contributions. The authors finally discuss the importance of the resonance Raman effect for sp/sup 2/-type defect characterization, and the disorganization level provided by unequal light coupling with different cluster size. (35 Refs.)