Preparation and Static Performance Testing of Piezoelectric Actuators with Equally Spaced Spiral Electrodes

Abstract

Based on the Archimedes spiral equation, a piezoelectric actuator with equally spaced spiral electrodes is proposed in this paper. The electrode structure and driving principle of the actuator are analyzed. The spiral electrodes are fabricated by screen printing method, and the components to be tested are prepared. A displacement test platform was built to test the static performance of the element, and its static radial displacement and plane torsion angle were investigated. The experimental results show that under the action of sinusoidal excitation signal with frequency of 0. 5 Hz and voltage of 200 V, the radial peak displacement of spiral electrode piezoelectric actuator with diameter of 25 mm, thickness of 2 mm, electrode width of 0. 6 mm and electrode center distance of 1. 2 mm can reach 1. 02 μm, which is 1. 57 times of that of traditional electrode piezoelectric actuator. The torsion angle can reach 0. 12 mrad. Compared with the traditional piezoelectric actuator, the device has larger radial displacement output and produces obvious torsion angle.