Aerosol spray deposition of liquid metal and elastomer coatings for rapid processing of stretchable electronics

Abstract

We report a spray deposition technique for patterning liquid metal alloys to form stretchable conductors, which can then be encapsulated in silicone elastomers via the same spraying procedure. While spraying has been used previously to deposit many materials, including liquid metals, this work focuses on quantifying the spraying process and combining it with silicones. Spraying generates liquid metal microparticles (~5 µm diameter) that pass through openings in a stencil to produce traces with high resolution (~300 µm resolution using stencils from a craft cutter) on a substrate. The spraying produces sufficient kinetic energy (~14 m/s) to distort the particles on impact, which allows them to merge together. This merging process depends on both particle size and velocity. Particles of similar size do not merge when cast as a film. Likewise, smaller particles (<1 µm) moving at the same speed do not rupture on impact either, though calculations suggest that such particles could rupture at higher velocities. The liquid metal features can be encased by spraying uncured silicone elastomer from a volatile solvent to form a conformal coating that does not disrupt the liquid metal features during spraying. Alternating layers of liquid metal and elastomer may be patterned sequentially to build multilayer devices, such as soft and stretchable sensors.