2-D experimental study of the plasma parameter variations of the magnetically sustained DC discharge in cylindrical symmetry in argon

Abstract

Two similar experimental set-ups were used to measure axial and radial distribution of discharge plasma parameters at different magnetic fields. Both systems were cylindrical magnetrons with outer cylindrically-shaped anode and coaxially placed cathode - both the discharge vessels had diameters approximately 6 cm and they were 30 cm and 11 cm long respectively. In the longer magnetron the measurements were made using three radially movable cylindrical Langmuir probes placed at three different axial positions and in the shorter magnetron the axially movable probe was used. From the measurements there were evaluated electron density, electron mean energy, plasma potential and floating potential. © 2004 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.