Design and implementation of gas sensor array based on fluorescence quenching detection using CMOS-MEMS process

Abstract

This study implements the optical-based gas sensor array design using the TSMC 0.35μm 2P4M standard CMOS process. The gas concentration is detected based on the fluorescence intensity (with high specificity) measured by the proposed sensor. This design has four merits: (1) integration of multiple photo-sensors, thermal-isolation structure, and optical based gas-sensing films using CMOS and polymer dispensing technologies, (2) multiple optical sensors equipped with thermal compensation unit are monolithically integrated, (3) various sensing films can be prepared for multiple gases detection, (4) room temperature measurement can be achieved so that the device has low power consumption. In applications, the concentration of O2 and CO2 are measured. Measurement results show the sensitivity of gas concentration are respectively 0.051 μA/% (O2/N2) and 0.036μA/% (CO2/N2).