Tailoring particle arrays by isotropic plasma etching: An approach towards percolated perpendicular media

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Abstract

Plasma etching of densely packed arrays of polystyrene particles leads to arrays of spherical nanostructures with adjustable diameters while keeping the periodicity fixed. A linear dependence between diameter of the particles and etching time was observed for particles down to sizes of sub-50nm. Subsequent deposition of Co/Pt multilayers with perpendicular magnetic anisotropy onto these patterns leads to an exchange-decoupled, single-domain magnetic nanostructure array surrounded by a continuous magnetic film. The magnetic reversal characteristic of the film-particle system is dominated by domain nucleation and domain wall pinning at the particle locations, creating a percolated perpendicular media system. © 2009 IOP Publishing Ltd.

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Brombacher, C., Saitner, M., Pfahler, C., Plettl, A., Ziemann, P., Makarov, D., … Albrecht, M. (2009). Tailoring particle arrays by isotropic plasma etching: An approach towards percolated perpendicular media. Nanotechnology, 20(10). https://doi.org/10.1088/0957-4484/20/10/105304

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