Study of surface damage in silicon by irradiation with focused rubidium ions using a cold-atom ion source

Abstract

Cold-atom ion sources have been developed and commercialized as alternative sources for focused ion beams (FIBs). So far, applications and related research have not been widely reported. In this paper, a prototype rubidium FIB is used to study the irradiation damage of 8.5 keV beam energy Rb+ ions on silicon to examine the suitability of rubidium for nanomachining applications. Transmission electron microscopy combined with energy dispersive x-ray spectroscopy is applied to silicon samples irradiated by different doses of rubidium ions. The experimental results show a duplex damage layer consisting of an outer layer of oxidation without Rb and an inner layer containing Rb mostly at the interface to the underlying Si substrate. The steady-state damage layer is measured to be 23.2(±0.3) nm thick with a rubidium staining level of 7(±1) atomic percentage.