On-demand fabrication of microplasma-polymerized styrene films using automatic motion controller

Abstract

We have developed a new fabrication method for on-demand microplasma-golymerized sryrene film (MPPSF) The synthesis can be achieved on any substrate under atmospheric pressure using a laboratory-made torch-type microplasma polymerization apparatus. The fabrication conditions of MPPSF upon silicon wafers using localized patterning was investigated using a scanning atmospheric-pressure microplasma jet machine with automatic motion controller. We found that the dominant parameters were nozzle height from substrate, helium gas flow rate, and the scanning speed of the substrate holder. These were optimized to clarify the fundamental characteristics of scanning microplasma processing. Maskless pattern coating according to the CAD data has been successfully carried out using a prototype of the scanning microplasma jet coating system (SMPJCS). We have demonstrated line art painting of triangle, rectangle, and star patterns with flat coating of the local area and typeface coating using the characters "AIST" to show its potential as a rapid microfabrication tool for on-demand functional MPP-films on any substrates synthesized by an automatic motion controller. ©2007TAPJ.