Book Chapter

A Brief History and State of the Art of Ellipsometry

  • Irene E
Springer Berlin Heidelberg, (2013), 1-30
DOI: 10.1007/978-3-642-33956-1_1
N/ACitations
Citations of this article
13Readers
Mendeley users who have this article in their library.
Get full text

Abstract

Ellipsometry is a nonperturbing optical technique that uses the change in the state of polarization of light upon reflection for the ex-situ and in-situ and real-time characterization of surfaces, interfaces, thin films and nanostructured materials. This chapter...

Cite

CITATION STYLE

APA

Irene, E. A. (2013). A Brief History and State of the Art of Ellipsometry. In Ellipsometry at the Nanoscale (pp. 1–30). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-642-33956-1_1

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Save time finding and organizing research with Mendeley

Sign up for free