Nested trampoline resonators for optomechanics

Abstract

Two major challenges in the development of optomechanical devices are achieving a low mechanical and optical loss rate and vibration isolation from the environment. We address both issues by fabricating trampoline resonators made from low pressure chemical vapor deposition Si3N4 with a distributed Bragg reflector mirror. We design a nested double resonator structure with 80 dB of mechanical isolation from the mounting surface at the inner resonator frequency, and we demonstrate up to 45 dB of isolation at lower frequencies in agreement with the design. We reliably fabricate devices with mechanical quality factors of around 400 000 at room temperature. In addition, these devices were used to form optical cavities with finesse up to 181 000 ± 1000. These promising parameters will enable experiments in the quantum regime with macroscopic mechanical resonators.