Conference Proceedings

OPC modeling by genetic algorithm

  • Huang W
  • Lai C
  • Luo B
  • et al.
DOI: 10.1117/12.602096
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Huang, W. C., Lai, C. M., Luo, B., Tsai, C. K., Tsay, C. S., Lai, C. W., … Lin, B. J. (2005). OPC modeling by genetic algorithm (p. 133). SPIE-Intl Soc Optical Eng. https://doi.org/10.1117/12.602096

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