A Micropowered Chemoresistive Sensor Based on a Thin Alumina Nanoporous Membrane and Snx Bik Moy Oz Nanocomposite

Abstract

This work presents and discusses the design of an efficient gas sensor, as well as the technological process of its fabrication. The optimal dimensions of the different sensor elements including their deformation were determined considering the geometric modeling and the calculated moduli of the elasticity and thermal conductivity coefficients. Multicomponent Snx Bik Moy Oz thin films were prepared by ionic layering on an anodic alumina membrane and were used as gas-sensitive layers in the sensor design. The resistance of the Snx Bik Moy Oz nanostructured film at temperatures up to 150◦ C exceeded 106 Ohm but decreased to 104 Ohm at 550◦ C in air. The sensitivity of the Snx Bik Moy Oz composite to concentrations of 5 and 40 ppm H2 at 250◦ C (10 mW) was determined to be 0.22 and 0.40, respectively.