Highly Efficient Cutting of Quartz Glass with Low Roughness and Minor Chipping Using Bessel Laser Beams

Abstract

The conventional method of cutting quartz glass with a knife often leads to undesirable effects, such as chipping, debris generation, and an inconsistent cut quality. Additionally, implementing the current methods of laser ablation cutting and crack control cutting presents challenges in ensuring both the quality of the cut and the efficiency of the process. Previous reports have documented a single direct cut of thin quartz glass, albeit at a thickness of only 200 μm. In this study, we utilized a pulse-width-tunable Gaussian beam, in combination with an axicon and a beam-reducing mirror, to generate a high-quality Bessel beam. This process endows the quartz glass with a nano-porous structure with a thickness of 1 mm, enabling high-quality cutting in a single pass. The effects of laser-cutting speed and pulse width on the cutting cross-section and cut surface were investigated. The results of the experiments show that using the optimal cutting speed and pulse width significantly improved cutting quality, reduced surface damage and sputtering, enabled the penetration of the modified cutting cross-section throughout the material, and decreased cutting cross-section roughness to 607 nm Ra. This technique holds promise for the laser-processing industry, enhancing both the quality and efficiency of cutting 1 mm thick quartz glass.