A metallic glass grating for X-ray grating interferometers fabricated by imprinting

Abstract

In X-ray grating interferometry, the fabrication of thick transmission gratings with pitches of several micrometers has been a key subject. We report on a metallic glass imprinting technique for fabricating an interferometer grating. We successfully fabricated an 8-μm-pitch, 10-μm-thick grating (26mm2) made of Pd42.5Ni7.5Cu30P20 metallic glass by using the technique, and as a demonstration we also performed X-ray phase imaging with the grating. The technique can be applied to fabricate not only X-ray but also neutron gratings potentially at high production rates and low costs and is expected to be widely used in the near future. © 2014 The Japan Society of Applied Physics.