ELECTRON PROBE MICROANALYSIS

Abstract

Four components are now to be found in every instrument of this kind-an electron optical system (gun and lenses) to focus the electron beam on the specimen surface, a spectrometer to analyze the x-radiation emitted by the specimen at the point of impact of the electron probe and to measure the intensity of the characteristic rays, a specimen holder to enable the specimen to be moved under the incident beam, and an optical microscope arranged so that the specimen can be observed in order to choose and identify the points of impact of the electron beam.