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Protection of high frequency generators with unstable load

IOP Conference Series: Materials Science and Engineering (2020) 734(1)
DOI: 10.1088/1757-899X/734/1/012004
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Abstract

Methods of adaptive matching of variable load impedance with RF energy sources are investigated. A gradient algorithm for controlling the adaptation process is proposed. Model and full-scale experiments were carried out, which confirmed the effectiveness of the protection of high-frequency generators from fluctuations in load impedance.

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Samoylov, A. G., Samoylov, V. S., Samoylov, S. A., & Tahar, A. (2020). Protection of high frequency generators with unstable load. In IOP Conference Series: Materials Science and Engineering (Vol. 734). Institute of Physics Publishing. https://doi.org/10.1088/1757-899X/734/1/012004

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