Abstract
This contribution refers to a methodology for the extraction of RF macromodels for electrostatically actuated switches. The extraction is based on the results obtained from three RF simulations carried out at the device-level model, with the finite integration technique, and use of a fitting procedure based on closed form relationships for the TL-lumped macromodel. Two test configurations were studied and acceptable relative errors in the S-parameters are obtained. Improvements are sometimes possible if a frequency dependent model is adopted for the switch inductivity.
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Ciuprina, G., DiţǍ, C. B., Lup, A. S., Ioan, D., & ŞtefǍnescu, A. (2015). Extraction of TL-lumped RF macromodels for MEMS switches. In Proceedings of 2015 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization, NEMO 2015. Institute of Electrical and Electronics Engineers Inc. https://doi.org/10.1109/NEMO.2015.7415062
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