Physical Modeling of p-Type Fluorinated Al-Doped Tin-Oxide Thin Film Transistors

Abstract

Fabrication, physical modeling and dynamic response of p -type Al-doped SnOx active channel thin film transistors (TFTs) are presented for the potential application of ultra-high definition (UHD) displays. After deposition of Al-doped SnOx active layer using reactive co-sputtering, the channel was treated with plasma fluorination which improve the device performance of high I{ON}/I{OFF} ratio of > 106, low subthreshold swing of 100 mV/dec and high field-effect mobility ( μ {FE}) of 4.8 cm{2}V{-1}s{-1}. To understand the origin of such high performance, physical modeling and numerical simulations were performed using density of state (DOS) model of defects/traps of oxide semiconductor. This model describes the modifications of donor-like tail states and acceptor-like Gaussian defect states due to Al doping on SnOx and fluorine treatment. To evaluate the device performance for UHD large scale displays, the dynamic responses of p -type TFT pixel circuit for various requirements are simulated with physical models. These results suggest that the Al-doped SnOx TFTs are potential candidates for future high-definition displays and many applications in transparent electronics.