Extreme High-Resolution SEM: A Paradigm Shift

Abstract

“Extreme high-resolution” (XHR) scanning electron microscopy (SEM) has the potential to change the way we look at SEM. Anyone in the SEM world knows that you don't do high-resolution SEM at low accelerating voltages because of chromatic aberration limitations. The XHR design offers a new way to deal with chromatic aberration and realize the huge benefit of reduced beam penetration.The new Magellan 400 SEM family is the first to offer subnanometer resolution over the entire electron energy range from 1 keV to 30 keV, effectively establishing a new performance category known as XHR SEM (Figure 1). To achieve this unprecedented performance, the Magellan combines novel electron optical design elements with technologies developed for the industry-leading Titan (scanning) transmission electron microscope (S/TEM) and DualBeam (focused ion /SEM) platforms.