QUANTITATIVE ANALYSIS BY AUGER ELECTRON SPECTROSCOPY.

Abstract

A review is presented of the physical model of quantitative Auger analysis. The authors also propose standard quantitative correction procedure based on a combination of M. P. Seah & W. A. Dench's IMFP-data and R. Shimizu & S. Ichimura's backscattering factors, by providing functional representations of the backscattering factors. It is hoped that this will lead to more comprehensive and accurate quantitative Auger analysis. This will enable the accuracy of quantitative analysis to be improved and make the comparison of results derived by different workers more meaningful.