Formation of ceramic targets for solid electrolytes sputtering

Abstract

The results of ceramic targets formation from powders of Li1.3Al0.3Ti1.7(PO4)3 and Li6.4Al0.2La3Zr2O12 solid electrolytes by cold pressing with subsequent high-temperature sintering are presented. Solid electrolyte powders of Li1.3Al0.3Ti1.7(PO4)3 (LATP) with the NASICON structure and Li6.4Al0.2La3Zr2O12 (LLZ) with the garnet structure with high Li-ion conductivity were synthesized by methods protected by patents in the RF, suitable for mass production. The conditions for the formation of dense single-phase targets (14 mm in diameter and 8-10 mm thick) from LATP and LLZ (cubic modification) solid electrolytes were established by X-ray diffraction analysis. The ionic conductivity, Li+ ion transfer number and electronic conductivity of LATP and LLZ ceramic targets were determined by electrochemical impedance spectroscopy and potentiostatic chronoamperometry methods.