Differential laser Doppler based non-contact sensor for dimensional inspection with error propagation evaluation

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Abstract

To achieve dynamic error compensation in CNC machine tools, a non-contact laser probe capable of dimensional measurement of a workpiece while it is being machined has been developed and presented in this paper. The measurements are automatically fed back to the machine controller for intelligent error compensations. Based on a well resolved laser Doppler technique and real time data acquisition, the probe delivers a very promising dimensional accuracy at few microns over a range of 100 mm. The developed optical measuring apparatus employs a differential laser Doppler arrangement allowing acquisition of information from the workpiece surface. In addition, the measurements are traceable to standards of frequency allowing higher precision. © 2006 by MDPI.

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APA

Mekid, S., & Vacharanukul, K. (2006). Differential laser Doppler based non-contact sensor for dimensional inspection with error propagation evaluation. Sensors, 6(6), 546–556. https://doi.org/10.3390/s6060546

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