Fabrication and electrical characterization of multiwalled carbon nanotube-based circuit at room temperature

Abstract

Multiwalled carbon nanotube (MWCNT) deposited on a pair of predetermined aluminum electrodes treated with the (3-Aminopropyl)-triethoxysilane (APTES) self-assembled monolayers (SAMs). The MWCNT bridges electrodes and forms electrode/MWCNT/electrode circuit on silicon with 500nm silicon dioxide. Then the Metal (Ti/Au) pads were fabricated on MWCNT to bury the MWCNT into metal electrodes. The electrical properties of MWCNT-based circuits before and after the fabrication of metal pads were characterized. Results indicate that metal pads on MWCNT improved the electrical properties MWCNT-based circuit largely. Copyright © 2011 Yitian Peng et al.