Analysis, Design And Simulation Of Piezoelectric Acoustic Microsensor

Abstract

Kertas kerja ini membentangkan reka bentuk analisis dan simulasi mikropenderia akustik piezoelektrik untuk meniru tiang-tiang rerambut dalam telinga manusia. Mikropenderia ini dikaji bagi membangunkan mikrofon baru. Bahan piezoelektrik PZT 5A digunakan sebagai tiangtiang rerambut atau rasuk dalam mikropenderia akustik piezoletrik. Analisis dijalankan menggunakan perisian FEMLAB bagi mengenal pasti panjang rasuk untuk mendapatkan frekuensi jalur oktaf dengan julat 31.5Hz dan 16kHz. Kemudian, perisian SIMULINK pula digunakan bagi menyelaku prestasi mikropenderia akustik. Luas keratan rentas rasuk ditetapkan 9 μm × 9 μm dan panjang pula berubah-ubah bagi mendapatkan pelbagai frekuensi salun. Panjang sesuai lebar jalur kuasa separuh dan faktor kualiti telah berjaya diperolehi menggunakan FEMLAB®. Prosedur penyelakuan telah dijalankan bagi mendapatkan aras kuasa bunyi bagi rasuk. Panjang rasuk, separuh kuasa lebar jalur, faktor kualiti dan kuasa bunyi merupakan parameter penting dalam mereka bentuk mikropenderia akustik. Kata kunci: Mikropenderia akustik, lebar jalur kuasa separuh, frekuensi jalur oktaf, bahan piezoletrik This paper presents the design analysis, and simulation of piezoelectric acoustic microsensor to imitate outer hair cells (OHCs) inside the human ear. This acoustic microsensor was utilised to develop a new type of microphone. Piezoelectric material PZT 5A was used as the hair cells or beams for the piezoelectric acoustic microsensor. The analysis was conducted using FEMLAB® software to identify the corresponding length to acquire the octave band frequency ranging from 31.5 Hz to 16 kHz. Furthermore, SIMULINK® software was employed to simulate the performance of the acoustic microsensor. The cross section area of the beams was kept at a constant value of 9 × 9 μm and their length was varied to acquire various resonant frequencies. The suitable lengths, the half power bandwidths and the quality factors of the beams were successfully obtained using FEMLAB®. The simulation procedure was undertaken to obtain sound power level of the beams. The length, half power bandwidth, quality factor and the sound power of the beams are important parameters in designing the acoustic microsensor. Key words: Acoustic microsensor, half power bandwidth, octave band frequency, piezoelectric material