A new type of vacuum sensors with sensitive elements based on multicomponent oxide nanomaterials with fractal structures

Abstract

A new type of vacuum sensors with sensitive elements based on two- and three-component oxide nanomaterials with fractal structures is proposed. It is shown that a sensory response for two-component oxide systems based on SiO2-SnO2 is determined by their quantitative composition - mass fraction of tin dioxide. An increase in sensitivity to changes in ambient pressure for three-component oxide nanomaterials has been demonstrated.