Scanning probe microscopy and spectroscopy: From basic research to industrial applications

Abstract

An overview of industrial applications of scanning probe microscopy (SPM) is given. The first part describes possible applications for the fabrication of semiconductor devices by SPM-methods and the use of SPM-based techniques for an ultra high density storage (UHDS) device. The second part shows the ability of SPMs as a characterization tool for integrated circuits (ICs). They can be used in defect analysis, process characterization, and monitoring. And they offer the measurement of each significant value with a spatial dimension of less than 100 nm. So the SPM is useful for a fab today, and irreplaceable for a fab in the future.