Measurements of electron temperature, and ion density, in a mixture of O2 and Ar plasma

Abstract

Optical emission spectroscopy was applied for plasma characterization of a gas mixture glow discharge of O2 and Ar at a total pressure of 1.0 Torr, power of 150 W, and with 40 l/min flow rate of gases. The main diagnostic techniques applied to determine the plasma parameters were optical and probe diagnostics. We study the dependence of the electron density and temperature as a function of the relative O2 concentration. The emission bands and lines were measured using a monochromator in the wavelength range from 200 to 1000 nm. We also study the dependence of the principal band intensities observed as the relative O2 concentration was increasing from 0 to 100 % of the mixture. © 2010 IOP Publishing Ltd.