Study on the thermal interaction mechanism between C 4 F 7 N-N 2 and copper, aluminum

Abstract

The thermal interaction mechanism between C 4 F 7 N (fluorinated nitrile)-N 2 gas mixture using as substitute to SF 6 with metal was investigated. We found that interaction between C 4 F 7 N-N 2 and copper leads to surface corrosion or gas decomposition with interface temperature at 120℃-220℃. The oxidation of copper and accumulation of F, CF x and CN can be found and gaseous by-products such as C 3 F 6 , CF 3 H, C 3 F 6 O is produced. C 4 F 7 N-N 2 has better compatibility with aluminum than that of copper due to the existence of alumina. The interaction between C 4 F 7 N and alumina surface has the lowest adsorption energy, charge transfer compared with that of copper and aluminum.