Abstract
This paper presents a Monte Carlo (MC) simulation tool which is applied to describe the ion beam induced damage generated by electronic excitation in LiNbO3. Based on a previously published thermal spike based analytical model, the MC technique allows for a more flexible and accurate treatment of the problem. A main advantage of this approach with respect to the analytical one is the possibility of studying the role of statistical fluctuations, relevant at low fluences. The paper recalls the main features of the physical model, describes the MC algorithm, and compares simulation results to experimental data (irradiations of LiNbO3 using silicon ions at 5 and 7.5 MeV and oxygen ions at 5 MeV). © 2006 American Institute of Physics.
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CITATION STYLE
García, G., Agulló-López, F., Olivares-Villegas, J., & García-Navarro, A. (2006). Monte Carlo simulation of damage and amorphization induced by swift-ion irradiation in LiNbO3. Journal of Applied Physics, 99(5). https://doi.org/10.1063/1.2175464
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