Spherical wave illumination scanning digital holographic profilometry

Abstract

In this work, we proposed what we believe to be a novel scanning solution for the assessment of high-NA samples, referred to as spherical-wave illumination scanning digital holographic profilometry (SWS-DHP). This approach introduces a 2F optimization methodology, based on the measurement of the focal length of the object to determine the spherical component of the scanning. Furthermore, re-optimization of 2F, whether it needs to be operated depends on the measured object's NA to inspect more information. Meanwhile, utilizing phase space analysis shows SWS superiority in information transfer for high-NA samples compared to plane-wave illumination scanning. In addition, this method introduces a shape reconstruction algorithm with volumetric aberration compensation based on the propagation of the aberrated object and illumination waves to obtain high-quality measurements. Finally, the imaging merits of SWS-DHP were proved through simulations and were experimentally verified for the object of NA up to 0.87.