Application of 3D surface profilometer in single cut sample inspection

Abstract

As a non-contact measuring instrument, 3D surface profilometer has many advantages such as high precision, good repeatability and high visualization, and has become the mainstream measuring equipment in the field of micro and nano detection. Single cut line sample, multi cut line sample and step sample have important applications in micro/nano calibration field. In this paper, 3D surface profilometer is used to measure two kinds of samples. The results are compared with those obtained by National Institute of Metrology. The results show that the results are similar to those obtained by other measuring equipment, which proves the powerful function of 3D surface profilometer.