MEMS-based electric field sensor with environmental adaptability consideration and its application in the near-ground atmosphere

Abstract

The near-ground electric field (E-field) is an important parameter needed to be measured for lightning warning systems. Yet, most of the E-field sensors are based on bulky and expensive rotate-vane mills. This paper presents a novel MEMS(Micro-electro-mechanical Systems)-based sensor and its application in near-ground atmospheric E-field long-term monitoring. We solve the problem of environmental adaptability by means of a novel macromolecular polymer package and moisture-proof design. To enhance the electric field resolution, a Φ 36mm 17mm probe is mounted separately from the signal processing circuit. Both finite element simulation and experimental results prove that this sensor could detect the electric field as small as 5V/m. The real-time monitoring data have a good consistency with those of the commercial electric field mill.