Angle-based wavefront sensing enabled by the near fields of flat optics

Abstract

There is a long history of using angle sensors to measure wavefront. The best example is the Shack-Hartmann sensor. Compared to other methods of wavefront sensing, angle-based approach is more broadly used in industrial applications and scientific research. Its wide adoption is attributed to its fully integrated setup, robustness, and fast speed. However, there is a long-standing issue in its low spatial resolution, which is limited by the size of the angle sensor. Here we report a angle-based wavefront sensor to overcome this challenge. It uses ultra-compact angle sensor built from flat optics. It is directly integrated on focal plane array. This wavefront sensor inherits all the benefits of the angle-based method. Moreover, it improves the spatial sampling density by over two orders of magnitude. The drastically improved resolution allows angle-based sensors to be used for quantitative phase imaging, enabling capabilities such as video-frame recording of high-resolution surface topography.