State-of-the art computers need high performance transistors, which consume ultra-low power resulting in longer battery lifetime. Billions of transistors are integrated neatly using matured silicon fabrication process to maintain the performance per cost advantage. In that context, low-cost mono-crystalline bulk silicon (100) based high performance transistors are considered as the heart of today's computers. One limitation is silicon's rigidity and brittleness. Here we show a generic batch process to convert high performance silicon electronics into flexible and semi-transparent one while retaining its performance, process compatibility, integration density and cost. We demonstrate high-k/metal gate stack based p-type metal oxide semiconductor field effect transistors on 4 inch silicon fabric released from bulk silicon (100) wafers with sub-threshold swing of 80 mV dec-1 and on/off ratio of near 104 within 10% device uniformity with a minimum bending radius of 5 mm and an average transmittance of ∼7% in the visible spectrum.
CITATION STYLE
Rojas, J. P., Sevilla, G. A. T., & Hussain, M. M. (2013). Can we build a truly high performance computer which is flexible and transparent? Scientific Reports, 3. https://doi.org/10.1038/srep02609
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