Enhanced Secondary-Electron Detection of Single-Ion Implants in Silicon through Thin SiO 2 Layers

E. B. Schneider; O. G. Lloyd-Willard; K. Stockbridge; M. Ludlow; S. Eserin; L. Antwis; D. C. Cox; R. P. Webb; B. N. Murdin; S. K. Clowes

Journal ArticleOPEN ACCESS

Enhanced Secondary-Electron Detection of Single-Ion Implants in Silicon through Thin SiO 2 Layers

Schneider E
Lloyd-Willard O
Stockbridge K
et al.

Nano Letters (2026)

DOI: 10.1021/acs.nanolett.5c05280

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Schneider, E. B., Lloyd-Willard, O. G., Stockbridge, K., Ludlow, M., Eserin, S., Antwis, L., … Clowes, S. K. (2026). Enhanced Secondary-Electron Detection of Single-Ion Implants in Silicon through Thin SiO 2 Layers. Nano Letters. https://doi.org/10.1021/acs.nanolett.5c05280

Enhanced Secondary-Electron Detection of Single-Ion Implants in Silicon through Thin SiO 2 Layers

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