A study of piezoresistive pressure sensor technology

Abstract

The pressure sensor technology has grown to a large market since its discovery. These sensors are widely used in all spheres ranging from commercial, industrial, biomedical and even to military applications. This study tends to provide a review of the micro electro mechanical systems (M EMS) Piezoresistive Pressure Sensor Technology. This study includes the basic engineering involved in these sensors, important terms and the performance characteristics. The aim is to present the detailed research in a concise yet precise form.