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Micromachined probe for high density data storage

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest (2001) 2
DOI: 10.2184/lsj.29.supplement_s11
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Ono, T., Minh, P. N., Lee, D. W., & Esashi, M. (2001). Micromachined probe for high density data storage. In Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest (Vol. 2). https://doi.org/10.2184/lsj.29.supplement_s11

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